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Proceedings Paper

IAD-Si coatings on RB-SiC space mirrors for ultrasmooth surfaces
Author(s): Lingdi Xu; Xuejun Zhang; Ruigang Li; Feng Zhang; Xu Wang
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Paper Abstract

To eliminate surface limitation caused by Silicon impurity in RB-SiC space mirrors, a relatively thick Si film is deposited on well finished RB-SiC substrate by a new process-ion assisted depositing (IAD) to provide a better polishable surface. Testing results of IAD-Si properties are provided, showing that the amorphous film has great thermal shock resistance. Then, polishing experiments on 10±0.5μm thick IAD-Si layers are accomplished focusing on smoother surface. Surface figure and micro-roughness of the coating after polished reach 0.026λ RMS (λ=0.6328nm) and less than 0.5nm RMS respectively. Moreover, reflectivity of IAD-Si polished surface with reflective films increases higher than 4.5% than that of RB-SiC in 360-1100nm. High reflectivity and desirable thermal property make IAD-Si an attractive coating material for RB-SiC space mirrors.

Paper Details

Date Published: 20 May 2009
PDF: 6 pages
Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 72820W (20 May 2009); doi: 10.1117/12.830814
Show Author Affiliations
Lingdi Xu, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of the Chinese Academy of Sciences (China)
Xuejun Zhang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Ruigang Li, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Feng Zhang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Xu Wang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of the Chinese Academy of Sciences (China)


Published in SPIE Proceedings Vol. 7282:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; John M. Schoen; Yoshiharu Namba; Shengyi Li, Editor(s)

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