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Proceedings Paper

Annealing induced optical properties of YSZ thin films prepared by EB-PVD
Author(s): Chao-Yang Li; Guang-Jian Xing; Yong-Jun Yang; Wei Jiang
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Paper Abstract

In this study, YSZ thin films with different Y2O3 content have been prepared by electron beam evaporation on different types of substrates. The film properties such as surface roughness, microstructure, refractive index and transmission spectra were characterized by using Scanning Probe Microscopy (SPM), X-ray diffraction, SEM, ellipsometer and spectrophotometer respectively. The results indicate that the film properties and microstructure correlate with the annealing process dramatically. It is found the film structure undergoes from amorphous to tetragonal phase then ultimately to tetragonal and monoclinic phase with the temperature increasing from 100 to 1100°C, while the surface roughness increases from 1.3 to 24.6nm, and the refractive index varies from 1.86 to 2.02. XRD analysis shows the grain size increased with the annealing temperature, the reduction of defect and surface compact incurred by the high temperature process results in the increase of refractive index. Further investigations show that the optical properties of YSZ films have little effect with the content of Y2O3 and the variation of refractive index is caused by the compactness due to the crystallization of the films under high temperature.

Paper Details

Date Published: 21 May 2009
PDF: 5 pages
Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 72820P (21 May 2009); doi: 10.1117/12.830807
Show Author Affiliations
Chao-Yang Li, Beijing Institute of Graphic Communication (China)
Guang-Jian Xing, Beijing Institute of Petrochemical Technologies (China)
Yong-Jun Yang, Changcheng Institute of Metrology and Measurement (China)
Wei Jiang, Beijing Institute of Petrochemical Technologies (China)


Published in SPIE Proceedings Vol. 7282:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; John M. Schoen; Yoshiharu Namba; Shengyi Li, Editor(s)

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