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Proceedings Paper

Fabrication of microglass lens mould by using ultraprecision microgrinding process
Author(s): Shaohui Yin; Kun Tang; Yongjian Zhu; Fengjun Chen; Yufeng Fan; Li Guo
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Paper Abstract

With the rapid development of information technology and electro-optical communication industry, various micro optical lenses have been used widely. Especially, because of great advantages concerning life, stability and imaging characteristics, the demand for glass lens is increasing the high-precision imaging. This paper studies on the ultra-precision parallel grinding technique of micro glass lens mould and investigates the form error compensation technique in grinding process. Grinding test of micro-lens mould with 10mm in diameter is conducted, and the surface roughness of Ra 5.98nm, Rz 34.95nm and form accuracy of PV 113nm, RMS 23nm are obtained.

Paper Details

Date Published: 21 May 2009
PDF: 5 pages
Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 728206 (21 May 2009); doi: 10.1117/12.830785
Show Author Affiliations
Shaohui Yin, Hunan Univ. (China)
Kun Tang, Hunan Univ. (China)
Yongjian Zhu, Hunan Univ. (China)
Fengjun Chen, Hunan Univ. (China)
Yufeng Fan, Hunan Univ. (China)
Li Guo, Hunan Univ. (China)


Published in SPIE Proceedings Vol. 7282:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; John M. Schoen; Yoshiharu Namba; Shengyi Li, Editor(s)

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