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Proceedings Paper

Double-swing method used for polishing off-axis aspherical mirrors
Author(s): Peng Wang; Jun-feng Li; Bin Xuan; Xiao-ping Chen; Shu-mei Song; Ya Chen; Jing-jiang Xie
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Paper Abstract

Based on the characteristics of off-axis aspherical surface, a new method used for polishing off-axis aspherical mirrors-Double-Swing Method (DSM) is proposed in this paper, and the polishing mechanism of DSM is introduced. The mathematical model of the DSM with steady movement state is established. The movement of this mathematical model is simulated in a programming language; the comparison of simulation effects under different parameters is made. In order to achieve optimal parameters, a high order off-axis rectangle aspherical mirror has been polished by DSM. The final result of profile measurements of 12nm, RMS is achieved. The result indicates that the method is of practice and has even higher working efficiency and precision.

Paper Details

Date Published: 20 May 2009
PDF: 5 pages
Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 728203 (20 May 2009); doi: 10.1117/12.830781
Show Author Affiliations
Peng Wang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of the Chinese Academy of Sciences (China)
Jun-feng Li, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of the Chinese Academy of Sciences (China)
Bin Xuan, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of the Chinese Academy of Sciences (China)
Xiao-ping Chen, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of the Chinese Academy of Sciences (China)
Shu-mei Song, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Ya Chen, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Jing-jiang Xie, Changchun Institute of Optics, Fine Mechanics and Physics (China)


Published in SPIE Proceedings Vol. 7282:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; John M. Schoen; Yoshiharu Namba; Shengyi Li, Editor(s)

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