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Proceedings Paper

Measuring aspheres with a chromatic Fizeau interferometer
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Paper Abstract

The established method to measure aspherical surfaces is interferometric testing with null optics, but due to economical reasons the applications are limited. A special null optic has to be calculated, fabricated and qualified for each individual type of asphere. This time- and money consuming method is only cost-efficient for large quantities or when tests require high accuracy. We propose a new and flexible technique for measuring an ensemble of different aspheres with only one measurement setup. The main idea is to use the wavelength as a tunable parameter. Because it is possible to change the wavelength without introducing new errors by mechanical movements, the wavelength variation results in a higher measurement flexibility without reducing the measurement accuracy. We present the chromatic Fizeau Interferometer with a diffractive element as null-optic for the measurement of a set of four aspheres. We will show the influence of unwanted diffraction orders and the expected measurement accuracy. As in the monochromatic setup, especially the area around the optical axis is problematic and can not be measured with the desired accuracy. The use of a small aperture stop on the optical axis is recommended because errors in other radial domains are filtered as well. The results show, that the chromatic Fizeau interferometer makes the established monochromatic method far more flexible and that different aspheres can be measured in the same setup.

Paper Details

Date Published: 17 June 2009
PDF: 9 pages
Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 738919 (17 June 2009); doi: 10.1117/12.830658
Show Author Affiliations
L. Seifert, Fraunhofer-Institut für Integrierte Schaltungen (Germany)
C. Pruss, Univ. Stuttgart (Germany)
B. Dörband, Carl Zeiss SMT AG (Germany)
W. Osten, Univ. Stuttgart (Germany)

Published in SPIE Proceedings Vol. 7389:
Optical Measurement Systems for Industrial Inspection VI
Peter H. Lehmann, Editor(s)

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