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Proceedings Paper

pRSM: models for model-based litho-hotspot repairs
Author(s): Marko Chew; Toshikazu Endo; Yue Yang
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Paper Abstract

Computing repair hints for litho hotspots is made more effective with a model of how Process Window contour bands changes as a function of design layout changes. We have developed a modeling methodology called pRSM (Partition Response Surface Model). In our approach, we create a family of models along with error bound estimate models. We first classify design layout configurations into a small number of partition categories and then build a RSM model and error bound model for each partition category. In this paper we describe our pRSM methodology and present results illustrating the advantages of our methodology over that of traditional RSM approaches.

Paper Details

Date Published: 23 September 2009
PDF: 11 pages
Proc. SPIE 7488, Photomask Technology 2009, 74883L (23 September 2009); doi: 10.1117/12.829723
Show Author Affiliations
Marko Chew, Mentor Graphics Corp. (United States)
Toshikazu Endo, Mentor Graphics Corp. (United States)
Yue Yang, Mentor Graphics Corp. (United States)

Published in SPIE Proceedings Vol. 7488:
Photomask Technology 2009
Larry S. Zurbrick; M. Warren Montgomery, Editor(s)

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