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Proceedings Paper

Sinusoidal phase modulating interferometer for real-time surface profile measurement
Author(s): Xing-Wen Tan; Guo-Tian He
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Paper Abstract

The optical interferometry for surface profile measurement, with an ability of high-accuracy and non-contact measurement has a wide application in industrial production and scientific research. In this paper, a sinusoidal phase modulating(SPM) interferometer to realize real-time surface profile measurement is proposed, and its measurement principle is analyzed theoretically. In the SPM interferometer, the interference signal is detected by a high speed image sensor based on a low-speed CCD and discriminated by a signal processing circuit to obtain the phase of each measurement point on the surface. In experiments, the surface profile of an optical wedge was measured by the interferometer. For 30x30 measuring points, the measurement time is less than10ms. Repeatability of the measurement is 4.3nm. The usefulness of the interferometer is verified by the experimental results.

Paper Details

Date Published: 20 May 2009
PDF: 6 pages
Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72832I (20 May 2009); doi: 10.1117/12.828715
Show Author Affiliations
Xing-Wen Tan, Southwest Univ. (China)
Chongqing Univ. (China)
Guo-Tian He, Chongqing Normal Univ. (China)
Shanghai Hengyi Optics & Fine Mechanics Co., Ltd (China)


Published in SPIE Proceedings Vol. 7283:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; James C. Wyant; Robert A. Smythe; Hexin Wang, Editor(s)

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