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Proceedings Paper

Accuracy and error analysis of real-time surface profile measurement with sinusoidal phase modulation interferometer
Author(s): Guotian He; Helun Jiang; Rongchang Liao
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Paper Abstract

Sinusoidal-phase modulation interferometer is a new type of optical precision measuring instrument with nanometer accuracy real-time surface profile measurement. This paper based on real-time surface profile measurement of sinusoidal-phase modulation interferometry, researched filter theory and phase-interference in real-time measurement systems, its phase error is analyzed, and it discusses the theory of error types and causes of error, error estimation and derived measurement formula. Experiment proves the correctness of theory and application of research findings in the works in a certain significance.

Paper Details

Date Published: 20 May 2009
PDF: 6 pages
Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72831N (20 May 2009); doi: 10.1117/12.828674
Show Author Affiliations
Guotian He, Chongqing Univ. (China)
Chongqing Normal Univ. (China)
Helun Jiang, Chongqing Technology and Business Univ. (China)
Rongchang Liao, Chongqing Normal Univ. (China)


Published in SPIE Proceedings Vol. 7283:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; James C. Wyant; Robert A. Smythe; Hexin Wang, Editor(s)

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