Share Email Print
cover

Proceedings Paper

Study on the technology of sinusoidal phase modulating interferometry based on Fourier transform algorithm
Author(s): Guotian He; Min Wu; Shuchen Liu; Linzhi Deng
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Sinusoidal phase modulation interference survey technology is an advanced interference measuring technique in international front. Through introducing the piezoelectric ceramics (PZT) of sinusoidal vibration in Michelson interferometer reference path of light ,we carry on the modulation to the reference light, which produces modulation item along with the time sine change of interference signal. The demodulation is carried on based on Fourier analysis method to obtain the phase of corresponding object to measure the interference signal. This article proposes the algorithm of Fourier analysis method to carry on the solution to the interference signal, discusses the influence of the algorithm on measuring accuracy and compares it with traditional method. Experimental result indicates the sinusoidal phase modulation interference survey technology is an effective interference measuring technique with high accuracy.

Paper Details

Date Published: 20 May 2009
PDF: 5 pages
Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72831M (20 May 2009); doi: 10.1117/12.828672
Show Author Affiliations
Guotian He, Chongqing Normal Univ. (China)
Chongqing Univ. (China)
Min Wu, Chongqing Normal Univ. (China)
Shuchen Liu, Chongqing Normal Univ. (China)
Linzhi Deng, Chongqing Normal Univ. (China)


Published in SPIE Proceedings Vol. 7283:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; James C. Wyant; Robert A. Smythe; Hexin Wang, Editor(s)

© SPIE. Terms of Use
Back to Top