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Proceedings Paper

Interfaces roughness cross correlation properties and light scattering of optical thin films
Author(s): Yong-qiang Pan; Zhen-sen Wu; Ling-xia Hang
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Paper Abstract

In order to study optical thin films interfaces roughness cross correlation properties and light scattering, theoretical models of optical thin films interfaces roughness light scattering are concisely presented. Furthermore, influence of interfaces roughness cross-correlation properties to light scattering was analyzed by total backscattering. Moreover, TiO2 single optical films thickness, substrate roughness of K9 glass and ion beam assisted deposition (IBAD) technique effect on interface roughness cross correlation properties were studied by experiments, respectively. The results showed that theoretical results obtained by integrating vector light scattering were agreed well with experimental results. The interfaces roughness cross-correlation decrease with the increase of films thickness or with the decrease of substrates roughness. When ion beam assisted deposition was used, a high degree of cross-correlated can be obtained.

Paper Details

Date Published: 20 May 2009
PDF: 6 pages
Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72830V (20 May 2009); doi: 10.1117/12.828623
Show Author Affiliations
Yong-qiang Pan, Xi'an Univ. of Science and Technology (China)
Xidian Univ. (China)
Zhen-sen Wu, Xidian Univ. (China)
Ling-xia Hang, Xi'an Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 7283:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment

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