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Proceedings Paper

Study on surface topography of IBS oxide multilayer mirrors
Author(s): Yong Chen; Xiao Zhang; Fan Shan; Boxiong Chen
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Paper Abstract

The surface topography of oxide multilayer mirrors with Ion Beam Sputtering (IBS) technology is experimentally investigated by Atomic Force Microscope (AFM). Different film materials, substrates polishing and cleaning methods are experimented for promoting the mirrors quality, respectively. PSD (Power Spectral Density) characteristic of different substrates and films has been compared. Surface roughness with different polished methods has been analyzed too. The result shows that the depositional property of film materials determines the principal characteristic of mirror surface topography, and the substrate polishing and cleaning quality mostly affects the mirror optical quality.

Paper Details

Date Published: 20 May 2009
PDF: 5 pages
Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72830R (20 May 2009); doi: 10.1117/12.828614
Show Author Affiliations
Yong Chen, Northwestern Polytechnical Univ. (China)
Xiao Zhang, Flight Automatic Control Research Institute (China)
Fan Shan, Flight Automatic Control Research Institute (China)
Boxiong Chen, Flight Automatic Control Research Institute (China)


Published in SPIE Proceedings Vol. 7283:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment

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