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Proceedings Paper

Phase retrieval based wavefront sensing experimental implementation and wavefront sensing accuracy calibration
Author(s): Heng Mao; Xiao Wang; Dazun Zhao
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Paper Abstract

As a wavefront sensing (WFS) tool, Baseline algorithm, which is classified as the iterative-transform algorithm of phase retrieval, estimates the phase distribution at pupil from some known PSFs at defocus planes. By using multiple phase diversities and appropriate phase unwrapping methods, this algorithm can accomplish reliable unique solution and high dynamic phase measurement. In the paper, a Baseline algorithm based wavefront sensing experiment with modification of phase unwrapping has been implemented, and corresponding Graphical User Interfaces (GUI) software has also been given. The adaptability and repeatability of Baseline algorithm have been validated in experiments. Moreover, referring to the ZYGO interferometric results, the WFS accuracy of this algorithm has been exactly calibrated.

Paper Details

Date Published: 20 May 2009
PDF: 5 pages
Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72830L (20 May 2009); doi: 10.1117/12.828604
Show Author Affiliations
Heng Mao, Beijing Institute of Technology (China)
Xiao Wang, Beijing Institute of Technology (China)
Dazun Zhao, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 7283:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment

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