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Proceedings Paper

Large dynamic range optical metrology with radial shearing interferometry
Author(s): Dahai Li; Xiaoping Qi; Yiping Cao; Xin Zhou; Qionghua Wang
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Paper Abstract

Optical metrology for elements with large dynamic range is very important, especially in aspheric components testing field. Cyclic radial shearing interferometer(CRSI) with a small radial shearing ratio of the expanded wavefront's radii to the contracted version's radii can obtain a small magnitude optical path difference(OPD) because the expanded wavefront and its contracted version nearly have the same shape and magnitude, especially for an optical component to be tested with rotationally symmetric surface. The number of fringe pattern can be decreased dramatically and recorded by CCD. This paper demonstrates the feasibility that CRSI could be used to measure an aspheric surface with large dynamic range and large aperture.

Paper Details

Date Published: 20 May 2009
PDF: 4 pages
Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72830G (20 May 2009); doi: 10.1117/12.828599
Show Author Affiliations
Dahai Li, Sichuan Univ. (China)
Xiaoping Qi, Sichuan Univ. (China)
Yiping Cao, Sichuan Univ. (China)
Xin Zhou, Sichuan Univ. (China)
Qionghua Wang, Sichuan Univ. (China)


Published in SPIE Proceedings Vol. 7283:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; James C. Wyant; Robert A. Smythe; Hexin Wang, Editor(s)

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