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Proceedings Paper

3D measurement method based on wavelet transform by using SEM
Author(s): Yasuhiko Arai; M. Ando; S. Yokozeki
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Paper Abstract

The three-dimensional measurement method by SEM has already been proposed by using the principle of shadow moiré. In this method, there are some troubles in order to perform a high-resolution analysis. A new method based on the principle of projection moiré is discussed to solve the troubles. In this paper, the mechanism of producing some shadows of the grid on the surface of the object by back scattering electron beam is discussed. Fringe image as the shadow of grating is analyzed by the Wavelet transform. 3-D precise measurement can be realized by using the phenomenon of shadows of grid by electron. The error analysis of the proposed method is also performed. Furthermore, a three dimensional structure of the head of a hard disk is measured by the system using the grating of which pitch is 4 μm. From comparison with AFM, it is confirmed that the proposed method has high-resolution power.

Paper Details

Date Published: 10 September 2009
PDF: 9 pages
Proc. SPIE 7432, Optical Inspection and Metrology for Non-Optics Industries, 743207 (10 September 2009); doi: 10.1117/12.828518
Show Author Affiliations
Yasuhiko Arai, Kansai Univ. (Japan)
M. Ando, Kansai Univ. (Japan)
S. Yokozeki, Jyouko Applied Optics Lab. (Japan)


Published in SPIE Proceedings Vol. 7432:
Optical Inspection and Metrology for Non-Optics Industries
Peisen S. Huang; Toru Yoshizawa; Kevin G. Harding, Editor(s)

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