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Proceedings Paper

Swing-arm optical CMM for aspherics
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Paper Abstract

A profilometer for in situ measurement of the topography of aspheric mirrors called the Swing arm Optical CMM (SOC) was built, and has been used for measuring the figure of 1.4 m convex aspheric mirrors with a performance rivaling full aperture interferometric tests. Errors in the SOC that have odd symmetry are self-calibrated due to the test geometry. Even errors are calibrated against a full aperture interferometric test.

Paper Details

Date Published: 21 August 2009
PDF: 8 pages
Proc. SPIE 7426, Optical Manufacturing and Testing VIII, 74260J (21 August 2009); doi: 10.1117/12.828493
Show Author Affiliations
Peng Su, College of Optical Sciences, The Univ. of Arizona (United States)
Chang Jin Oh, College of Optical Sciences, The Univ. of Arizona (United States)
Robert E. Parks, College of Optical Sciences, The Univ. of Arizona (United States)
James H. Burge, College of Optical Sciences, The Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 7426:
Optical Manufacturing and Testing VIII
James H. Burge; Oliver W. Fähnle; Ray Williamson, Editor(s)

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