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Proceedings Paper

The Iris AO S163-X, a 489 actuator, 163-piston/tip/tilt-segment MEMS DM
Author(s): Michael A. Helmbrecht; Min He; Carl J. Kempf; Patrick Rhodes
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Paper Abstract

Iris AO has been developing microelectromechanical systems (MEMS) based deformable mirrors (DM) for a number of years. This paper presents a review of the basic segmented DM design and shows test results of a 111-actuator, 37- piston/tip/tilt (PTT) segment DM. A 489-actuator 163-PTT-segment design is described as well as progress towards the fabrication of the device. A view to the future is shown by describing path-finding research towards 3000-actuator, 1000- PTT-segment DMs.

Paper Details

Date Published: 11 August 2009
PDF: 8 pages
Proc. SPIE 7466, Advanced Wavefront Control: Methods, Devices, and Applications VII, 74660E (11 August 2009); doi: 10.1117/12.828384
Show Author Affiliations
Michael A. Helmbrecht, Iris AO, Inc. (United States)
Min He, Iris AO, Inc. (United States)
Carl J. Kempf, Iris AO, Inc. (United States)
Patrick Rhodes, Iris AO, Inc. (United States)

Published in SPIE Proceedings Vol. 7466:
Advanced Wavefront Control: Methods, Devices, and Applications VII
Richard A. Carreras; Troy A. Rhoadarmer; David C. Dayton, Editor(s)

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