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Proceedings Paper

Advanced x-ray optics with Si wafers and slumped glass
Author(s): R. Hudec; V. Marsikova; M. Mika; J. Sik; M. Lorenc; L. Pina; A. Inneman; M. Skulinova
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Paper Abstract

We report on the continuation of the development of test samples of astronomical x-ray optics based on thermally formed glass foils and on bent Si wafers. Experiments with thermal glass forming have continued adding wider range of evaluated and optimized parameters including viscosity and internal stress analyses, as well as investigation of mounting influences. Experiments with Si wafers focused on their quality improvements such as flatness and thickness uniformity in order to better meet the requirements of future X-ray astronomy projects applications, as well as on study of their surface quality, defects analysis, and methods for its reproducible measurement.

Paper Details

Date Published: 31 August 2009
PDF: 12 pages
Proc. SPIE 7437, Optics for EUV, X-Ray, and Gamma-Ray Astronomy IV, 74370S (31 August 2009); doi: 10.1117/12.827978
Show Author Affiliations
R. Hudec, Astronomical Institute (Czech Republic)
Czech Technical Univ. (Czech Republic)
V. Marsikova, Rigaku Innovative Technologies Europe (Czech Republic)
Institute of Chemical Technology (Czech Republic)
M. Mika, Institute of Chemical Technology (Czech Republic)
J. Sik, ON Semiconductor Czech Republic (Czech Republic)
M. Lorenc, ON Semiconductor Czech Republic (Czech Republic)
L. Pina, Rigaku Innovative Technologies Europe (Czech Republic)
Czech Technical Univ. (Czech Republic)
A. Inneman, Rigaku Innovative Technologies Europe (Czech Republic)
M. Skulinova, Astronomical Institute (Czech Republic)


Published in SPIE Proceedings Vol. 7437:
Optics for EUV, X-Ray, and Gamma-Ray Astronomy IV
Stephen L. O'Dell; Giovanni Pareschi, Editor(s)

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