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Proceedings Paper

Roughness measurement methodology according to DIN 4768 using optical coherence tomography (OCT)
Author(s): Marcello M. Amaral; Marcus P. Raele; José P. Caly; Ricardo E. Samad; Nilson D. Vieira; Anderson Z. Freitas
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Paper Abstract

Measure roughness in some sort of samples can present several problems when it is done in traditional way (with physical contact). For instance, soft samples will present at least two kinds of problem: (a) the value presented by the equipment not represents the sample roughness; (b) the equipment can perform serious damages to the sample. Using a commercial type OCT (Thorlabs Inc.) with 6μm axial resolution (in air) and 6μm lateral resolution, measurements of roughness standards with Ra nominal values of 0.8, 1.6, 3.2, 6.3, 12.5, 25.0 and 50.0 μm. A homemade software analysis the OCT images, and automatically calculates the Ra and Rz values. This procedure was performed to validate this methodology comparing the OCT and roughness standards values.

Paper Details

Date Published: 17 June 2009
PDF: 8 pages
Proc. SPIE 7390, Modeling Aspects in Optical Metrology II, 73900Z (17 June 2009); doi: 10.1117/12.827748
Show Author Affiliations
Marcello M. Amaral, Instituto de Pesquisas Energéticas e Nucleares (Brazil)
Marcus P. Raele, Instituto de Pesquisas Energéticas e Nucleares (Brazil)
José P. Caly, IPT-Instituto de Pesquisas Tecnológicas do Estado de Sao Paulo (Brazil)
Ricardo E. Samad, Instituto de Pesquisas Energéticas e Nucleares (Brazil)
Nilson D. Vieira, Instituto de Pesquisas Energéticas e Nucleares (Brazil)
Anderson Z. Freitas, Instituto de Pesquisas Energéticas e Nucleares (Brazil)


Published in SPIE Proceedings Vol. 7390:
Modeling Aspects in Optical Metrology II
Harald Bosse; Bernd Bodermann; Richard M. Silver, Editor(s)

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