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Proceedings Paper

Dynamic MEMS-based linear (1D) diffusers for laser beam homogenizing and beam shaping
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Paper Abstract

We present a dynamic laser beam shaper based on MEMS technology. We show a prototype of a dynamic diffuser made of single crystal silicon. A linearly deformable silicon micromembrane is used to diffuse a laser beam in one dimension. Resonance frequencies of the membrane can range from 1 kHz to 100 kHz. Diffusing angle can be tuned by adjusting the driving voltage. We measured a diffusing angle of 0.16° for an actuation voltage of 20 V.

Paper Details

Date Published: 21 August 2009
PDF: 8 pages
Proc. SPIE 7430, Laser Beam Shaping X, 74300H (21 August 2009); doi: 10.1117/12.827663
Show Author Affiliations
J. Masson, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
A. Bich, SUSS MicroOptics SA (Switzerland)
W. Noell, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
R. Voelkel, SUSS MicroOptics SA (Switzerland)
K. J. Weible, SUSS MicroOptics SA (Switzerland)
N. F. De Rooij, Ecole Polytechnique Fédérale de Lausanne (Switzerland)

Published in SPIE Proceedings Vol. 7430:
Laser Beam Shaping X
Andrew Forbes; Todd E. Lizotte, Editor(s)

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