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Proceedings Paper

Far field of binary phase gratings with errors in the height of the strips
Author(s): José María Rico-García; Luis Miguel Sanchez-Brea
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Paper Abstract

Diffraction gratings are not always ideal but, due to the fabrication process, several errors can be produced. In this work we show that when the strips of a binary phase diffraction grating present certain randomness in their height, the intensity of the diffraction orders varies with respect to that obtained with a perfect grating. To show this, we perform an analysis of the mutual coherence function and then, the intensity distribution at the far field is obtained. In addition to the far field diffraction orders, a "halo" that surrounds the diffraction order is found, which is due to the randomness of the strips height.

Paper Details

Date Published: 17 June 2009
PDF: 8 pages
Proc. SPIE 7390, Modeling Aspects in Optical Metrology II, 739019 (17 June 2009); doi: 10.1117/12.827580
Show Author Affiliations
José María Rico-García, Univ. Complutense de Madrid (Spain)
Luis Miguel Sanchez-Brea, Univ. Complutense de Madrid (Spain)


Published in SPIE Proceedings Vol. 7390:
Modeling Aspects in Optical Metrology II
Harald Bosse; Bernd Bodermann; Richard M. Silver, Editor(s)

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