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Proceedings Paper

Effect of surface defects on the self-images produced by diffraction gratings
Author(s): Luis Miguel Sanchez-Brea; Francisco Javier Salgado-Remacha; Francisco José Torcal-Milla
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Paper Abstract

Diffraction gratings have been successfully used in Optical Metrology for a long time. They can be found in scientific and industrial applications, such as optical encoders for determining the linear or angular displacement, spectrometers, robots, etc. Defects on the surface of the grating may occur due to the manufacturing process. Also dust particles, drops of liquids, etc. can be deposited on its surface the devices are placed in a dirty industrial environment. This separation from the ideal behaviour may produce a degradation of the self-images. In this work we analyze the effect produced by an irregular distribution of surface defects on the grating, with different distribution densities. In particular, we focus how the contrast of the self-images decreases when the defects density.

Paper Details

Date Published: 17 June 2009
PDF: 8 pages
Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 738932 (17 June 2009); doi: 10.1117/12.827574
Show Author Affiliations
Luis Miguel Sanchez-Brea, Univ. Complutense de Madrid (Spain)
Francisco Javier Salgado-Remacha, Univ. Complutense de Madrid (Spain)
Francisco José Torcal-Milla, Univ. Complutense de Madrid (Spain)


Published in SPIE Proceedings Vol. 7389:
Optical Measurement Systems for Industrial Inspection VI
Peter H. Lehmann, Editor(s)

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