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Proceedings Paper

Interferometric characterization of mono- and polycrystalline CVD diamond
Author(s): Maurizio Vannoni; Giuseppe Molesini; Silvio Sciortino; Stefano Lagomarsino; Paolo Olivero
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Paper Abstract

Mono and polycrystalline Chemical Vapor Deposited (CVD) diamond is a promising material for several advanced topics: microchips substrate, biological applications, UV and particle detection. Commercial CVD diamonds are available in small square size, commonly 3-5 millimeters side and 0.5-1.5 millimeters thickness. To improve diamond reliability for described applications, it is important to have a quality control on diamond samples, not only for electrical constants but also for optical characteristics and surface roughness. In this paper we present an optical characterization method based on interferometric instruments, to measure surface structure and internal homogeneity of mono ad polycrystalline commercial CVD diamonds, with measurement examples.

Paper Details

Date Published: 17 June 2009
PDF: 6 pages
Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 738931 (17 June 2009); doi: 10.1117/12.827535
Show Author Affiliations
Maurizio Vannoni, Istituto Nazionale di Ottica Applicata, CNR (Italy)
Giuseppe Molesini, Istituto Nazionale di Ottica Applicata, CNR (Italy)
Silvio Sciortino, Univ. of Florence (Italy)
Stefano Lagomarsino, Univ. of Florence (Italy)
Paolo Olivero, Univ. of Turin (Italy)

Published in SPIE Proceedings Vol. 7389:
Optical Measurement Systems for Industrial Inspection VI
Peter H. Lehmann, Editor(s)

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