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Proceedings Paper

Photothermal measurement of absorptance losses, temperature-induced wavefront deformation, and compaction in DUV optics
Author(s): Bernd Schäfer; Bernhard Flöter; Klaus Mann
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Paper Abstract

A measurement system for quantitative registration of transient and irreversible lens effects in DUV optics induced by absorbed UV laser radiation was developed at the Laser-Laboratorium Göttingen. It is based upon a strongly improved Hartmann-Shack wavefront sensor with an extreme sensitivity of ~λ/10000 RMS @ 193nm, accomplishing precise online monitoring of wavefront deformations of a collimated test laser beam transmitted through the laser-irradiated site of a sample. Caused by the temperature dependence of the refractive index as well as thermal expansion and compaction, the initially plane wavefront of the test laser is distorted into a convex or concave lens, dependent on sign and magnitude of index change and expansion. The observed wavefront distortion yields a quantitative measure of the absorption losses in the sample. Some results for fused silica and CaF2 are presented.

Paper Details

Date Published: 17 June 2009
PDF: 10 pages
Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73891D (17 June 2009); doi: 10.1117/12.827501
Show Author Affiliations
Bernd Schäfer, Laser-Lab. Göttingen e.V. (Germany)
Bernhard Flöter, Laser-Lab. Göttingen e.V. (Germany)
Klaus Mann, Laser-Lab. Göttingen e.V. (Germany)

Published in SPIE Proceedings Vol. 7389:
Optical Measurement Systems for Industrial Inspection VI
Peter H. Lehmann, Editor(s)

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