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Proceedings Paper

Simulation and fabrication of white light confocal microscope to attain the surface profile using CCD and image processing techniques
Author(s): E. Behroodi; A. Mousavian; H. Latifi
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Paper Abstract

An instrument to attain surface topography is White Light Confocal Microscope (WLCM).WLCM utilizes a spectrometer to analyze the scattering wavelength from the surface of a specimen. In this paper we used a CCD and some image processing techniques instead of spectrometer to determine the scattered wavelength. Both simulation (By Zemax Optical Design Software) and experiment have been performed. To reach the longitudinal chromatic aberration, two biconvex lenses with longitudinal chromatic aberration were used in the simulation and the experiment. Also, the lateral resolution is provided by a 40X microscope objective lens. The white light source of the experiment setup is a Xenon lamp and the used wavelength ranges from 420 nm to 630 nm. Comparison of the results showed an acceptable conformity between the simulation and the experiment. Finally, the topography of the surface was achieved.

Paper Details

Date Published: 17 June 2009
PDF: 10 pages
Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73892U (17 June 2009); doi: 10.1117/12.827471
Show Author Affiliations
E. Behroodi, Shahid Beheshti Univ. (Iran, Islamic Republic of)
A. Mousavian, Shahid Beheshti Univ. (Iran, Islamic Republic of)
H. Latifi, Shahid Beheshti Univ. (Iran, Islamic Republic of)


Published in SPIE Proceedings Vol. 7389:
Optical Measurement Systems for Industrial Inspection VI
Peter H. Lehmann, Editor(s)

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