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Proceedings Paper

Compensated laser encoder with symmetric and quasi-common-path heterodyne interferometry
Author(s): Cheng-Chih Hsu; Ju-Yi Lee; Chyan-Chyi Wu
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Paper Abstract

A novel laser encoder is presented for sub-nanometer displacement measurement. It is based on optical heterodyne interferometry and two arms of compensation optics with a symmetric and quasi-common-path optical configuration in polarization space. High stability and resolution can be achieved for displacement measurements. The theoretical analysis shows that our method can effectively compensate misalignments resulting from the dynamic runout in laser encoders. Experimental results reveal that the laser encoder can measure a displacement in subnanometer scale and in millimeter travel range.

Paper Details

Date Published: 17 June 2009
PDF: 10 pages
Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73891M (17 June 2009); doi: 10.1117/12.827453
Show Author Affiliations
Cheng-Chih Hsu, Yuan Ze Univ. (Taiwan)
Ju-Yi Lee, National Central Univ. (Taiwan)
Chyan-Chyi Wu, Tamkang Univ. (Taiwan)


Published in SPIE Proceedings Vol. 7389:
Optical Measurement Systems for Industrial Inspection VI
Peter H. Lehmann, Editor(s)

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