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Proceedings Paper

All-interferometric six-degrees-of-freedom sensor based on laser self-mixing
Author(s): Simona Ottonelli; Francesco De Lucia; Maurizio Dabbicco; Gaetano Scamarcio
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Paper Abstract

We report on the development of an all-interferometric sensor based on the laser-self-mixing for the simultaneous detection of multi-degrees-of-freedom displacement of a remote target. The prototype system consists only of a laser head, equipped with 6 diode lasers and a properly designed reflective target. Information on a single degree-of-freedom motion is extracted by the differential measurement of two linear displacements by means of two nominally identical self-mixing interferometers. The sensor has been experimentally tested to measure yaw, pitch, roll, straightness and flatness corrections over a continuous linear range of 1 m, with resolutions of 0.7 μm (longitudinal), 20 μm (straightness and flatness), 0.001° (yaw and pitch) and 0.015 °(roll).

Paper Details

Date Published: 17 June 2009
PDF: 10 pages
Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73891L (17 June 2009); doi: 10.1117/12.827345
Show Author Affiliations
Simona Ottonelli, CNR-INFM Regional Lab. LIT3 (Italy)
Univ. degli Studi di Bari (Italy)
Francesco De Lucia, CNR-INFM Regional Lab. LIT3 (Italy)
Univ. degli Studi di Bari (Italy)
Maurizio Dabbicco, CNR-INFM Regional Lab. LIT3 (Italy)
Univ. degli Studi di Bari (Italy)
Gaetano Scamarcio, CNR-INFM Regional Lab. LIT3 (Italy)
Univ. degli Studi di Bari (Italy)


Published in SPIE Proceedings Vol. 7389:
Optical Measurement Systems for Industrial Inspection VI
Peter H. Lehmann, Editor(s)

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