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Proceedings Paper

Makyoh topography studies of the morphology of periodic and quasi-periodic surfaces
Author(s): Ferenc Riesz
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Paper Abstract

Makyoh topography is an optical tool for the flatness testing of specular surfaces, based on the defocused detection of a collimated light beam reflected from the tested surface. The reflection image is related somehow to the surface relief pattern of the surface due to the focusing/defocusing action of the surface irregularities. The main application of the method is the assessment of the polishing quality of wafers in semiconductor technology. In this contribution, the imaging properties of periodic and quasiperiodic surfaces is analysed through analytic calculations and ray-tracing simulations for surfaces of various spectral properties. General imaging properties are established. Practical implications in the semiquantitative inspection of surface morphology/texture are pointed out, and experimental results are shown to illustrate the main points of the presented analysis.

Paper Details

Date Published: 17 June 2009
PDF: 8 pages
Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73892M (17 June 2009); doi: 10.1117/12.827337
Show Author Affiliations
Ferenc Riesz, Research Institute for Technical Physics and Materials Science (Hungary)

Published in SPIE Proceedings Vol. 7389:
Optical Measurement Systems for Industrial Inspection VI
Peter H. Lehmann, Editor(s)

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