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Proceedings Paper

Sensing performance of a Shack Hartmann wavefront sensor versus the properties of the light beam
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Paper Abstract

A Shack-Hartmann wavefront sensor (SHWS) uses a lenslet array to sample incoming wavefront on an image sensor, which is usually a Charge Coupled Device (CCD). By measuring the shift of centroids on CCD compared to reference spots, wavefront profile is reconstructed and therefore test surface shape is revealed. There are various factors that affect the performance of SHWS. In order to study how and to which extend does each factor affect reconstruction result, we established a simulation platform for SHWS in MATLAB. Through this platform, detailed properties and affecting factors were analyzed. Based on the system-oriented platform, we obtained some interesting findings, which are very important in the design of S-H wavefront sensors. In this paper, the performance-affecting significance of the key properties of the light beam, the diverging angle, the intensity distribution, and the intensity of the light beam, is simulated, analyzed and concluded. The simulation results are useful guide for the selection, design and preparation of the sensing light beam.

Paper Details

Date Published: 17 June 2009
PDF: 8 pages
Proc. SPIE 7390, Modeling Aspects in Optical Metrology II, 73900E (17 June 2009); doi: 10.1117/12.827327
Show Author Affiliations
L. P. Zhao, A*STAR Singapore Institute of Manufacturing Technology (Singapore)
W. J. Guo, Nanyang Technological Univ. (Singapore)
X. Li, A*STAR Singapore Institute of Manufacturing Technology (Singapore)
Z. W. Zhong, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 7390:
Modeling Aspects in Optical Metrology II
Harald Bosse; Bernd Bodermann; Richard M. Silver, Editor(s)

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