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Proceedings Paper

Influence of material dispersion on the measurement accuracy of chromatic sensors
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Paper Abstract

The work deals with the problem of non-contact measurement of the surface topography using chromatic (confocal) sensor. A detailed analysis of the influence of the refractive index of the plan-parallel plate material on the accuracy of measurement using chromatic sensor is performed. Relations which describe this phenomenon and enable to calculate an error due to material dispersion are derived. It can be seen from the performed analysis that the dispersion of plan parallel plate material causes measurement error that cannot by neglected for precise measurements.

Paper Details

Date Published: 17 June 2009
PDF: 6 pages
Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73892K (17 June 2009); doi: 10.1117/12.827279
Show Author Affiliations
Antonin Miks, Czech Technical Univ. in Prague (Czech Republic)
Jiri Novak, Czech Technical Univ. in Prague (Czech Republic)
Pavel Novak, Czech Technical Univ. in Prague (Czech Republic)
Pavel Kajnar, Czech Technical Univ. in Prague (Czech Republic)


Published in SPIE Proceedings Vol. 7389:
Optical Measurement Systems for Industrial Inspection VI
Peter H. Lehmann, Editor(s)

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