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Proceedings Paper

3D shape measurement using curvature data
Author(s): ByoungChang Kim; MinChel Kwon; ByoungUck Choo; InJeong Yoon
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Paper Abstract

We present a method of three dimensional shape measurement from the curvature data, which are obtained from the subaperture topography along the diagonal direction of artifact by using white-light scanning interferometry. The curvature is an intrinsic property of the artifact, which does not depend on the positioning errors of measuring sensor. Experimental results prove that the proposed method is useful, especially for large-scale optical surface profile measurement with nanometer accuracy. The current version of this paper has had a correction made to it at the request of the author. Please see the linked Errata for further details.

Paper Details

Date Published: 17 June 2009
PDF: 8 pages
Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73892H (17 June 2009); doi: 10.1117/12.827242
Show Author Affiliations
ByoungChang Kim, Kyungnam Univ. (Korea, Republic of)
MinChel Kwon, Kyungnam Univ. (Korea, Republic of)
ByoungUck Choo, Samyang Optics Co. (Korea, Republic of)
InJeong Yoon, Samyang Optics Co. (Korea, Republic of)


Published in SPIE Proceedings Vol. 7389:
Optical Measurement Systems for Industrial Inspection VI
Peter H. Lehmann, Editor(s)

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