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Proceedings Paper

Silicon cladding for mirror substrates
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Paper Abstract

To reduce the finishing costs of silicon carbide mirror substrates, silicon claddings are applied allowing the surfaces to be more easily diamond turned and polished than the bare chemical vapor deposited (CVD) silicon carbide or bimodal reaction bonded SiC (RB-SiC). The benefits of using silicon as the optical face will be reviewed as will the process for applying plasma enhanced chemical vapor (PE-CVD) deposited amorphous silicon cladding on substrates. Using one mirror as an example, the successful finishing results will be shared.

Paper Details

Date Published: 21 August 2009
PDF: 8 pages
Proc. SPIE 7425, Optical Materials and Structures Technologies IV, 74250C (21 August 2009); doi: 10.1117/12.827032
Show Author Affiliations
Christopher J. Duston, Entegris, Inc. (United States)
Nilesh Gunda, Entegris, Inc. (United States)
Jay R. Schwartz, L-3 Communications SSG-Tinsley (United States)
Joseph L. Robichaud, L-3 Communications SSG-Tinsley (United States)

Published in SPIE Proceedings Vol. 7425:
Optical Materials and Structures Technologies IV
Joseph L. Robichaud; William A. Goodman, Editor(s)

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