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Proceedings Paper

Three-dimensional profilometry based on focus method by projecting LC grating pattern
Author(s): Yukitoshi Otani; Fumio Kobayashi; Yasuhiro Mizutani; Toru Yoshizawa
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Paper Abstract

This paper describes a 3D surface profile measurement based on focus method by an optical sectioning. The optical system is employed uniaxial condition of projection and observation axis. The contrast of projected sinusoidal pattern onto the sample is approximated the Gauss distribution along the distance. The highest contrast indicates at the focused plane. It is possible to analyze the contrast distribution by a grating projected method using a liquid crystal grating. A phase-shifting method is applied to the contrast analysis. The liquid crystal grating is powerful tool to make arbitrary intensity and frequency distribution. Surface profiles of mechanical parts were measured to demonstrate for this method.

Paper Details

Date Published: 10 September 2009
PDF: 6 pages
Proc. SPIE 7432, Optical Inspection and Metrology for Non-Optics Industries, 743210 (10 September 2009); doi: 10.1117/12.827028
Show Author Affiliations
Yukitoshi Otani, Tokyo Univ. of Agriculture and Technology (Japan)
Fumio Kobayashi, Tokyo Univ. of Agriculture and Technology (Japan)
Yasuhiro Mizutani, Tokyo Univ. of Agriculture and Technology (Japan)
Toru Yoshizawa, Saitama Medical Univ. (Japan)


Published in SPIE Proceedings Vol. 7432:
Optical Inspection and Metrology for Non-Optics Industries
Peisen S. Huang; Toru Yoshizawa; Kevin G. Harding, Editor(s)

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