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Proceedings Paper

Chromatic confocal spectral interferometry for technical surface characterization
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Paper Abstract

Chromatic confocal spectral interferometry (CCSI) is a hybrid method for fast topography measurement, which combines the advantages of the interferometric gain and accuracy with the robustness of confocal microscopy. The CCSI-principle provides a single shot measurement of depth while offering a higher lateral resolution than commonly used spectral interferometers. This contribution is focused on the modeling and simulation of a CCSI-sensor for measuring rough surfaces, based on sequential and non-sequential ray-tracing. With the simulation, the influence of surface roughness, surface reflectivity, and surface contamination on reliability of the sensor can be estimated.

Paper Details

Date Published: 10 September 2009
PDF: 9 pages
Proc. SPIE 7432, Optical Inspection and Metrology for Non-Optics Industries, 74320Z (10 September 2009); doi: 10.1117/12.826902
Show Author Affiliations
W. Lyda, Univ. Stuttgart (Germany)
D. Fleischle, Univ. Stuttgart (Germany)
T. Haist, Univ. Stuttgart (Germany)
W. Osten, Univ. Stuttgart (Germany)

Published in SPIE Proceedings Vol. 7432:
Optical Inspection and Metrology for Non-Optics Industries
Peisen S. Huang; Toru Yoshizawa; Kevin G. Harding, Editor(s)

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