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Proceedings Paper

Development of a high-precision slit for x-ray beamline at SPring-8
Author(s): T. Takeuchi; M. Tanaka; T. Miura; Y. Senba; Y. Shimada; H. Tajiri; O. Sakata; M. Sato; T. Koganezawa; K. Uesugi; H. Ohashi; S. Goto
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Paper Abstract

A high-precision slit for monochromatic x-rays has been developed as one of the standardized components in the undulator beamline at SPring-8. Advanced experiments such as x-ray micro-beam diffraction and x-ray scanning microscope using nano-beam require small, variable and accurate apertures. The newly developed slit has an aperture size ranging from 1 μm × 1 μm to 20 mm × 20 mm with a resolution of 0.5 μm in full step. Each blade is independently driven through bellows mounted on both sides of the vacuum chamber. A set of bellows prevents displacement of the blade by evacuation. Using this slit, we could improve the displacement from 20 μm to 1 μm. The positioning accuracy of the slit is 0.5 μm. The slits have been installed in the three beamlines at SPring-8.

Paper Details

Date Published: 8 September 2009
PDF: 8 pages
Proc. SPIE 7448, Advances in X-Ray/EUV Optics and Components IV, 74480Y (8 September 2009); doi: 10.1117/12.826838
Show Author Affiliations
T. Takeuchi, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
M. Tanaka, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
T. Miura, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
Y. Senba, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
Y. Shimada, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
H. Tajiri, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
O. Sakata, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
M. Sato, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
T. Koganezawa, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
K. Uesugi, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
H. Ohashi, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
S. Goto, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)


Published in SPIE Proceedings Vol. 7448:
Advances in X-Ray/EUV Optics and Components IV
Ali M. Khounsary; Christian Morawe; Shunji Goto, Editor(s)

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