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Proceedings Paper

Zone plate tilt study in transmission x-ray microscope system at 8-11 keV
Author(s): Fu-Han Chao; Gung-Chian Yin; Keng S. Liang; Yin-Chieh Lai
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Paper Abstract

Zone plate [1] has been used as a focal lens in transmission X-ray microscope (TXM) optical system in recent decades [2, 3]. In TXM of NSRRC[4,5], the thickness of zone plate is about 900nm and the width of its out most zones is 50nm, which has a high aspect ratio 18. When zone plate is tilted, the image quality will be affected by aberration. Since the aspect ratio of zone plate is large, for incident beam, the shape of zone plate's transmission function will look different when zone plate is tilted. The both experimental and simulation result will be shown in this present. A five axes stage is designed and manufactured for the zone plate holder for three dimensional movement, tip and tilt. According to Fourier theory, we can calculate the wave distribution on image plane, if we know the original wave function, the distances between each element, and the transparencies of the sample and zone plate. A parallel simulation process code in MATLAB is developed in workstation cluster with up to 128Gbytes memory. The effects of aberration generated by tilt effect are compared from the experimental data and simulation result. A maximum tilt angle within the acceptable image quality is calculated by simulation and will be verified by experiment.

Paper Details

Date Published: 8 September 2009
PDF: 13 pages
Proc. SPIE 7448, Advances in X-Ray/EUV Optics and Components IV, 74480X (8 September 2009); doi: 10.1117/12.826723
Show Author Affiliations
Fu-Han Chao, National Chiao Tung Univ. (Taiwan)
National Synchrotron Radiation Research Ctr. (Taiwan)
Gung-Chian Yin, National Synchrotron Radiation Research Ctr. (Taiwan)
Keng S. Liang, National Synchrotron Radiation Research Ctr. (Taiwan)
Yin-Chieh Lai, National Chiao Tung Univ. (Taiwan)

Published in SPIE Proceedings Vol. 7448:
Advances in X-Ray/EUV Optics and Components IV
Ali M. Khounsary; Christian Morawe; Shunji Goto, Editor(s)

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