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Proceedings Paper

Coating of silicon pore optics
Author(s): C. P. Jensen; M. Ackermann; F. E. Christensen; M. J. Collon; M. Krumrey
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Paper Abstract

For the International X-ray observatory (IXO), a mirror module with an effective area of 3 m2 at 1.25 keV and at least 0.65 m2 at 6 keV has to be realized. To achieve this goal, coated silicon pore optics has been developed over the last years. One of the challenges is to coat the Si plates and still to realize Si-Si bonding. It has been demonstrated that ribbed silicon plates can be produced and assembled into stacks. All previously work has been done using uncoated Si plates. In this paper we describe how to coat the ribbed Si plates with an Ir coating and a top C coating through a mask so that there will be coating only between the ribs and not in the area where bonding takes place. The paper includes description of the mounting jig and how to align the mask on top of the plate. We will also present energy scans from Si plates coated through a mask.

Paper Details

Date Published: 31 August 2009
PDF: 8 pages
Proc. SPIE 7437, Optics for EUV, X-Ray, and Gamma-Ray Astronomy IV, 743713 (31 August 2009); doi: 10.1117/12.826432
Show Author Affiliations
C. P. Jensen, DTU-space (Denmark)
M. Ackermann, Cosine Research B.V. (Netherlands)
F. E. Christensen, DTU-space (Denmark)
M. J. Collon, cosine Research B.V. (Netherlands)
M. Krumrey, Physikalisch-Technische Bundesanstalt (Germany)


Published in SPIE Proceedings Vol. 7437:
Optics for EUV, X-Ray, and Gamma-Ray Astronomy IV
Stephen L. O'Dell; Giovanni Pareschi, Editor(s)

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