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Proceedings Paper

High-performance multi-channel fiber-based absolute distance measuring interferometer system
Author(s): Leslie L. Deck
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Paper Abstract

I describe the principle of operation and performance of a fiber-based absolute distance measuring interferometer system with 60 independent simultaneous channels. The system was designed for demanding applications requiring passive, electrically immune sensors with an extremely long MTTF. In addition to providing better than 0.3nm measurement repeatability at 5KHz for all channels, the system demonstrated absolute distance uncertainty of less than 5nm over a 500 micron measurement range.

Paper Details

Date Published: 21 August 2009
PDF: 9 pages
Proc. SPIE 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III, 74050E (21 August 2009); doi: 10.1117/12.826253
Show Author Affiliations
Leslie L. Deck, Zygo Corp. (United States)


Published in SPIE Proceedings Vol. 7405:
Instrumentation, Metrology, and Standards for Nanomanufacturing III
Michael T. Postek; John A. Allgair, Editor(s)

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