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Proceedings Paper

Nanoscale dimensional metrology in Russia
Author(s): V. P. Gavrilenko; Yu. A. Novikov; A. V. Rakov; P. A. Todua
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Paper Abstract

We discuss the formation of the system of nanoscale dimensional measurements in Russia. The traceability of the nanoscale measurements to the primary standard of the unit of length (the meter) is shown. Russian state standards that provide the standardization basis for such dimensional measurements are discussed.

Paper Details

Date Published: 21 August 2009
PDF: 8 pages
Proc. SPIE 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III, 740504 (21 August 2009); doi: 10.1117/12.826164
Show Author Affiliations
V. P. Gavrilenko, Ctr. for Surface and Vacuum Research (Russian Federation)
Yu. A. Novikov, A. M. Prokhorov General Physics Institute (Russian Federation)
A. V. Rakov, A. M. Prokhorov General Physics Institute (Russian Federation)
P. A. Todua, Ctr. for Surface and Vacuum Research (Russian Federation)


Published in SPIE Proceedings Vol. 7405:
Instrumentation, Metrology, and Standards for Nanomanufacturing III
Michael T. Postek; John A. Allgair, Editor(s)

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