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Proceedings Paper

Progress on the development of active micro-structured optical arrays for x-ray optics
Author(s): Daniel Rodriguez Sanmartin; Dou Zhang; Tim Button; Carolyn Atkins; Peter Doel; Hongchang Wang; David Brooks; Charlotte Feldman; Richard Willingale; Alan Michette; Slawka Pfauntsch; Shahin Sahraei; Matthew Shand; Ady James; Camelia Dunare; Tom Stevenson; William Parkes; Andy Smith
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Paper Abstract

The Smart X-Ray Optics (SXO) project comprises a U.K.-based consortium developing active/adaptive micro-structured optical arrays (MOAs). These devices are designed to focus X-rays using grazing incidence reflection through consecutive aligned arrays of microscopic channels etched in silicon. The silicon channels have been produced both by dry and wet etching, the latter providing smoother channel walls. Adaptability is achieved using piezoelectric actuators, which bend the device and therefore change its focal distance. We aim to achieve a 5 cm radius of curvature which can provide a suitable focal length using a tandem pair MOA configuration. Finite Element Analysis (FEA) modelling has been carried out for the optimization of the MOA device design, consider different types of actuators (unimorph, bimorph and active fibre composites), and different Si/piezoelectric absolute and relative thicknesses. Prototype devices have been manufactured using a Viscous Plastic Processing Process for the piezoelectric actuators and dry etched silicon channels, bonded together using a low shrinkage adhesive. Characterisation techniques have been developed in order to evaluate the device performance in terms of the bending of the MOA channels produced by the actuators. This paper evaluates the progress to date on the actuation of the MOAs, comparing FEA modelling with the results obtained for different prototype structures.

Paper Details

Date Published: 4 September 2009
PDF: 10 pages
Proc. SPIE 7448, Advances in X-Ray/EUV Optics and Components IV, 744808 (4 September 2009); doi: 10.1117/12.826096
Show Author Affiliations
Daniel Rodriguez Sanmartin, The Univ. of Birmingham (United Kingdom)
Dou Zhang, The Univ. of Birmingham (United Kingdom)
Tim Button, The Univ. of Birmingham (United Kingdom)
Carolyn Atkins, Univ. College London (United Kingdom)
Peter Doel, Univ. College London (United Kingdom)
Hongchang Wang, Diamond Light Source Ltd. (United Kingdom)
David Brooks, Univ. College London (United Kingdom)
Charlotte Feldman, Univ. of Leicester (United Kingdom)
Richard Willingale, Univ. of Leicester (United Kingdom)
Alan Michette, King's College London (United Kingdom)
Slawka Pfauntsch, King's College London (United Kingdom)
Shahin Sahraei, King's College London (United Kingdom)
Matthew Shand, King's College London (United Kingdom)
Ady James, Univ. College London (United Kingdom)
Camelia Dunare, The Univ. of Edinburgh (United Kingdom)
Tom Stevenson, The Univ. of Edinburgh (United Kingdom)
William Parkes, The Univ. of Edinburgh (United Kingdom)
Andy Smith, Science and Technology Facilities Council (United Kingdom)

Published in SPIE Proceedings Vol. 7448:
Advances in X-Ray/EUV Optics and Components IV
Ali M. Khounsary; Christian Morawe; Shunji Goto, Editor(s)

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