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Proceedings Paper

The fabrication and characterisation of piezoelectric actuators for active x-ray optics
Author(s): Dou Zhang; Daniel Rodriguez Sanmartin; Tim W. Button; Carl Meggs; Carolyn Atkins; Peter Doel; David Brooks; Charlotte Feldman; Richard Willingale; Alan Michette; Slawka Pfauntsch; Shahin Sahraei; Ady James; Camelia Dunare; Tom Stevenson; William Parkes; Andrew Smith; Hongchang Wang
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Paper Abstract

Piezoelectric actuators are widely employed in adaptive optics to enable an actively controlled mirror surface and improve the optical resolution and sensitivity. Currently two new prototype adaptive X-ray optical systems are under development through the Smart X-ray Optics project in a UK based consortium. One proposed technology is micro-structured optical arrays (MOAs) which uses aligned micro-channels structures obtained by deep silicon etching using both dry and wet techniques and bonded piezoelectric actuators to produce a micro-focused X-ray source for biological applications. The other technology is large scale optics which uses a thin shell mirror segment with 20-40 bonded piezo-actuators for the next generation of X-ray telescopes with an aim to achieve a resolution greater than that currently available by Chandra (0.5"). The Functional Materials Group of Birmingham University has the capability of fabricating a wide range of piezo-actuators including, for example, unimorph, bimorph and active fibre composites (AFC) by using a viscous plastic processing technique. This offers flexibility in customising the shapes (from planar to 3-D helix) and feature sizes (>20 μm) of the actuators, as well as achieving good piezoelectric properties. PZT unimorph actuators are being developed in this programme according to the design and implementation of the proposed mirror and array structures. Precise controls on the dimension, thickness, surface finishing and the curvature have been achieved for delivering satisfactory actuators. Results are presented regarding the fabrication and characterisation of such piezo-actuators, as well as the progress on the large optic and MOAs prototypes employing the piezo-actuators.

Paper Details

Date Published: 4 September 2009
PDF: 9 pages
Proc. SPIE 7448, Advances in X-Ray/EUV Optics and Components IV, 744807 (4 September 2009); doi: 10.1117/12.826018
Show Author Affiliations
Dou Zhang, The Univ. of Birmingham (United Kingdom)
Daniel Rodriguez Sanmartin, The Univ. of Birmingham (United Kingdom)
Tim W. Button, The Univ. of Birmingham (United Kingdom)
Carl Meggs, The Univ. of Birmingham (United Kingdom)
Carolyn Atkins, Univ. College London (United Kingdom)
Peter Doel, Univ. College London (United Kingdom)
David Brooks, Univ. College London (United Kingdom)
Charlotte Feldman, Univ. of Leicester (United Kingdom)
Richard Willingale, Univ. of Leicester (United Kingdom)
Alan Michette, King's College London (United Kingdom)
Slawka Pfauntsch, King's College London (United Kingdom)
Shahin Sahraei, King's College London (United Kingdom)
Ady James, Univ. College London (United Kingdom)
Camelia Dunare, The Univ. of Edinburgh (United Kingdom)
Tom Stevenson, The Univ. of Edinburgh (United Kingdom)
William Parkes, The Univ. of Edinburgh (United Kingdom)
Andrew Smith, Science and Technology Facilities Council (United Kingdom)
Hongchang Wang, Diamond Light Source Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 7448:
Advances in X-Ray/EUV Optics and Components IV
Ali M. Khounsary; Christian Morawe; Shunji Goto, Editor(s)

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