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Proceedings Paper

Wave field transformation at coherent imaging of a tilted reflection mask
Author(s): Igor A. Artyukov; Alexei V. Popov; Alexander V. Vinogradov
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Paper Abstract

The coherent beam wave field transformation is considered in the case of slanting illumination of a reflection mask. The parabolic wave equation is used to find the resulting field evolution in free space and after transmission by an ideal lens. Possible applications are lensless imaging, coherent X-ray diffraction imaging (CXDI), X-ray optics and X-ray laser based lithography and reflection microscopy, and high resolution X-ray topography.

Paper Details

Date Published: 28 September 2009
PDF: 3 pages
Proc. SPIE 7451, Soft X-Ray Lasers and Applications VIII, 745114 (28 September 2009); doi: 10.1117/12.825929
Show Author Affiliations
Igor A. Artyukov, P.N. Lebedev Physical Institute (Russian Federation)
Alexei V. Popov, Institute of Terrestrial Magnetism, Ionosphere and Radiowave Propagation (Russian Federation)
Alexander V. Vinogradov, P.N. Lebedev Physical Institute (Russian Federation)

Published in SPIE Proceedings Vol. 7451:
Soft X-Ray Lasers and Applications VIII
James Dunn; Gregory J. Tallents, Editor(s)

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