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Proceedings Paper

High-speed growth of pentacene thin films by in-line organic vapor phase deposition
Author(s): Cédric Rolin; Karolien Vasseur; Soeren Steudel; Peter Vicca; Jan Genoe; Paul Heremans
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Paper Abstract

Taking another step towards industrial production of devices based on organic semi-conductors, this work presents an extension of the organic vapor phase deposition technique to in-line geometry. A study of the in-line tool operation is carried out. It leads to the definition of a specific in-line deposition rate that qualifies the coating speed. It also allows for an understanding of processing parameter variations that lead to high deposition speeds. As a consequence, pentacene films are grown at in-line deposition rates of up to 1055μm2/s. This corresponds to web speeds of 2.1 m/min, equivalent to an average deposition rate of 105 Å/s in a static system. These films present a high uniformity, with a thickness standard deviation below 1.2% over 4 inch diameter substrates. Moreover, with transistor mobilities of up to 1.5 cm2/Vs, these pentacene films are of excellent electrical quality. This quality is conserved up to the highest deposition rates. Finally, 5-stage ring oscillators on foil based on a pentacene thin film deposited by in-line OVPD achieve a frequency of 24 kHz at a supply voltage of 20 V.

Paper Details

Date Published: 20 August 2009
PDF: 9 pages
Proc. SPIE 7417, Organic Field-Effect Transistors VIII, 741712 (20 August 2009); doi: 10.1117/12.825913
Show Author Affiliations
Cédric Rolin, IMEC (Belgium)
Karolien Vasseur, IMEC (Belgium)
Soeren Steudel, IMEC (Belgium)
Peter Vicca, IMEC (Belgium)
Jan Genoe, IMEC (Belgium)
Paul Heremans, IMEC (Belgium)

Published in SPIE Proceedings Vol. 7417:
Organic Field-Effect Transistors VIII
Zhenan Bao; Iain McCulloch, Editor(s)

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