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Proceedings Paper

An improved phase quadrature correction method by fitting the pesudo quadrature phase difference
Author(s): Chao-Wen Liang; Yung-Sheng Tsai
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Paper Abstract

A novel type of homodyne interferometer with a real time nonlinearity tracking and compensation algorithm is presented. This interferometer measures the displacement motion of an object with a single measuring laser beam and two photodiodes with π/2 phase difference. A novel nonlinearity correction method is derived based on minimizing pseudo phase difference between the quadrature channels. Experiment results shows that this method could correct not only the quadrature error caused by imperfection and misalignment of polarization optics, but also the variation of interference intensity related to laser power variation.

Paper Details

Date Published: 21 August 2009
PDF: 7 pages
Proc. SPIE 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III, 74050O (21 August 2009); doi: 10.1117/12.825854
Show Author Affiliations
Chao-Wen Liang, National Central Univ. (Taiwan)
Yung-Sheng Tsai, National Central Univ. (Taiwan)

Published in SPIE Proceedings Vol. 7405:
Instrumentation, Metrology, and Standards for Nanomanufacturing III
Michael T. Postek; John A. Allgair, Editor(s)

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