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Proceedings Paper

Microscopic TV sherography for microsystems characterization
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Paper Abstract

Microscopic TV holography (MTVH) is widely used for out-of-plane deformation and 3-D surface profile characterization of microsystems. However, the problem of overcrowding of fringes shows up when deformations are large, making quantitative fringe analysis difficult. In this paper, we introduce the use of microscopic TV sherography (MTVS) for microsystems characterization so that under relatively large out-of-plane deformation the slope of deformation is measured, rather than the deformation itself. The optical arrangement consists of a zoom imaging system with a conventional Michelson shear interferometer. We use the digital speckle photography (DSP) technique for precise measurement of magnitude of the lateral shear introduced between the two sheared images.

Paper Details

Date Published: 10 September 2009
PDF: 8 pages
Proc. SPIE 7432, Optical Inspection and Metrology for Non-Optics Industries, 74320T (10 September 2009); doi: 10.1117/12.825766
Show Author Affiliations
U. Paul Kumar, Indian Institute of Technology Madras (India)
N. Krishna Mohan, Indian Institute of Technology Madras (India)
M. P. Kothiyal, Indian Institute of technology Madras (India)


Published in SPIE Proceedings Vol. 7432:
Optical Inspection and Metrology for Non-Optics Industries
Peisen S. Huang; Toru Yoshizawa; Kevin G. Harding, Editor(s)

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