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Proceedings Paper

Iterative estimation of the topography by means of structured light
Author(s): Amalia Martínez García; Juan Antonio Rayas-Alvarez; Héctor José Puga Soberanes; Katia Genovese
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Paper Abstract

It is measured the topography of a large object by using structured light. The type of fringes generated are equivalent to the produced by divergent beams. In this case the relation between the phase and the height is not linear. In this work it is proposed an iterative estimation to the topography measurement. It is taken in account the variation of period in xdirection of the projected grating and the perspective problem of CCD camera. The shape obtained is compared with the measurements realized with a commercial scanner. The stop criterion value c in the algorithm was chosen of .1 mm. This value corresponds to resolution in z of commercial scanner. To this case, three iterations are enough to reach the value of c. It is observed that after three iterations, the value of z is approximately the same. It is obtained a great discrepancy to the topography measurement when does not use correction in perspective and in the period variation due to divergent projection of the fringes. The main contribution of this work is show that it is important consider the variation of period and the perspective problem in the measurement of the topography to large objects.

Paper Details

Date Published: 10 September 2009
PDF: 10 pages
Proc. SPIE 7432, Optical Inspection and Metrology for Non-Optics Industries, 743216 (10 September 2009); doi: 10.1117/12.825658
Show Author Affiliations
Amalia Martínez García, Ctr. de Investigaciones en Óptica A.C. (Mexico)
Juan Antonio Rayas-Alvarez, Ctr. de Investigaciones en Óptica A.C. (Mexico)
Héctor José Puga Soberanes, Instituto Tecnológico de León (Mexico)
Katia Genovese, Univ. degli Studi della Basilicata (Italy)


Published in SPIE Proceedings Vol. 7432:
Optical Inspection and Metrology for Non-Optics Industries
Peisen S. Huang; Toru Yoshizawa; Kevin G. Harding, Editor(s)

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