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Proceedings Paper

Label-free biosensors on silicon-on-insulator optical chips
Author(s): Katrien De Vos; Peter Debackere; Tom Claes; Jordi Girones; Wout De Cort; Etienne Schacht; Roel G. Baets; Peter Bienstman
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Paper Abstract

To come up to the demand for extremely sensitive biosensors for parallel real-time bioanalyses, we present several configurations of label-free biosensors on Silicon-on-Insulator (SOI) optical chips. We discuss results on microring resonators with a non-fouling polymer coating, increased sensitivity with slotted wire resonators and the design and fabrication of an integrated surface plasmon resonance interferometer. The high refractive index contrast of SOI offers submicron-size features with high quality for dense integration, high sensitivity and detection with very low analyte volumes. The fabrication method, 193nm deep-UV lithography, allows for mass production of cheap disposable biochips.

Paper Details

Date Published: 21 August 2009
PDF: 8 pages
Proc. SPIE 7397, Biosensing II, 739710 (21 August 2009); doi: 10.1117/12.825648
Show Author Affiliations
Katrien De Vos, Univ. Gent (Belgium)
Peter Debackere, Univ. Gent (Belgium)
Tom Claes, Univ. Gent (Belgium)
Jordi Girones, Univ. Gent (Belgium)
Wout De Cort, Univ. Gent (Belgium)
Etienne Schacht, Univ. Gent (Belgium)
Roel G. Baets, Univ. Gent (Belgium)
Peter Bienstman, Univ. Gent (Belgium)


Published in SPIE Proceedings Vol. 7397:
Biosensing II
Manijeh Razeghi; Hooman Mohseni, Editor(s)

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