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Proceedings Paper

Smart hyperspectral imaging detection based on electrically tunable liquid-crystal Fabry-Perot microstructure array
Author(s): Kan Liu; Dehua Li; Hui Li; Xinyu Zhang; Tianxu Zhang
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Paper Abstract

A smart spectral imaging detection method based on the integration of electrically tunable liquid-crystal(LC) Fabry-Perot(FP) microstructure array is proposed. It has very broad application in many fields with advantages of low cost, highly compact integration and working without mechanical part. The device can get hundreds of spectral bands simultaneously in one frame of picture in theory. This paper proposes the structure of smart spectral imaging array device, and analyses some key issues of liquid crystal Fabry-Perot structures for imaging application and calibration. Prototypes of 4 × 4 LC-FP array with the cavity thickness ranging from 4 to 20 μm for the working wavelength in the range of 800~900nm, are made by lithography and wet etching. Test is carried out and analysed.

Paper Details

Date Published: 17 August 2009
PDF: 10 pages
Proc. SPIE 7457, Imaging Spectrometry XIV, 74570U (17 August 2009); doi: 10.1117/12.825575
Show Author Affiliations
Kan Liu, Huazhong Univ. of Science and Technology (China)
Dehua Li, Huazhong Univ. of Science and Technology (China)
Hui Li, Huazhong Univ. of Science and Technology (China)
Xinyu Zhang, Huazhong Univ. of Science and Technology (China)
Tianxu Zhang, Huazhong Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 7457:
Imaging Spectrometry XIV
Sylvia S. Shen; Paul E. Lewis, Editor(s)

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