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Proceedings Paper

Super-resolution nanopatterns and optical recording in chalcogenide phase change thin films by direct laser writing
Author(s): Jingsong Wei; Xinbing Jiao
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Paper Abstract

We report experimental results of forming marks about 100~150nm in diameter on chalcogenide alloy thin films with a semiconductor laser of wavelength λ=650nm and a focusing lens of 0.65 numerical aperture (NA). The fact that the mark sizes are obviously smaller than the diffraction limit (The mark diameters are about 1/10 of the focused light spot) is explainable by analyzing the nonlinear absorption inside the thin film that is caused by the focused light spot of a Gaussian intensity distribution.

Paper Details

Date Published: 19 March 2009
PDF: 5 pages
Proc. SPIE 7125, Eighth International Symposium on Optical Storage and 2008 International Workshop on Information Data Storage, 712505 (19 March 2009); doi: 10.1117/12.825533
Show Author Affiliations
Jingsong Wei, Shanghai Institute of Optics and Fine Mechanics (China)
Xinbing Jiao, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 7125:
Eighth International Symposium on Optical Storage and 2008 International Workshop on Information Data Storage
Fuxi Gan, Editor(s)

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