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Proceedings Paper

Tabletop soft x-ray lithography
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Paper Abstract

A compact capillary discharge table top soft X ray laser was used for a table top photolithography tool using different approaches: holographic printing, interferometric lithography and coherent Talbot self imaging. Large areas, of the order of millimeter square, with periodic and arbitrary patterns were printed in a photoresist in short exposure times. The proof of principle of the lithographic technique achieved the expected ~100 nm resolution.

Paper Details

Date Published: 28 September 2009
PDF: 2 pages
Proc. SPIE 7451, Soft X-Ray Lasers and Applications VIII, 74510J (28 September 2009); doi: 10.1117/12.825509
Show Author Affiliations
M. C. Marconi, NSF Engineering Research Ctr. for Extreme Ultraviolet Science and Technology, Colorado State Univ. (United States)
P. W. Wachulak, NSF Engineering Research Ctr. for Extreme Ultraviolet Science and Technology, Colorado State Univ. (United States)
L. Urbanski, NSF Engineering Research Ctr. for Extreme Ultraviolet Science and Technology, Colorado State Univ. (United States)
Artak Isoyan, Univ. of Wisconsin-Madison (United States)
Fan Jiang, Univ. of Wisconsin-Madison (United States)
Yang Chun Cheng, Univ. of Wisconsin-Madison (United States)
J. J. Rocca, NSF Engineering Research Ctr. for Extreme Ultraviolet Science and Technology, Colorado State Univ. (United States)
C. S. Menoni, NSF Engineering Research Ctr. for Extreme Ultraviolet Science and Technology, Colorado State Univ. (United States)
F. Cerrina, NSF Engineering Research Ctr. for Extreme Ultraviolet Science and Technology, Colorado State Univ. (United States)
Univ. of Wisconsin-Madison (United States)


Published in SPIE Proceedings Vol. 7451:
Soft X-Ray Lasers and Applications VIII
James Dunn; Gregory J. Tallents, Editor(s)

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