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Proceedings Paper

Effect of solvent on morphological properties of TiOx thin film
Author(s): Meng-Yueh Liu; Chih-Hua Chang; Chin-Hsiang Chang; Jing-Shun Huang; Chia-Shin Chao; Yu-Hong Lin; Wen-Han Lin; Ching-Fuh Lin
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Paper Abstract

Sol-gel preparation of amorphous titanium oxide (TiOx) thin films with distinct morphological properties on the hydrophobic substrate was obtained by solution spin coating method. The TiOx thin films were deposited by three precursors using 2-methoxyethanol (2MOE), isopropanol (IPA) and mixture of 2MOE and hexane as solvents. We demonstrate evidence that the morphology of TiOx thin film is strongly related to the employment of dissimilar solvent. Among these three solvents, TiOx film obtained from 2MOE/hexane mixed solvent is a superior choice for the preparation of TiOx thin film on the hydrophobic substrate because of its smooth surface morphology.

Paper Details

Date Published: 20 August 2009
PDF: 7 pages
Proc. SPIE 7396, Physical Chemistry of Interfaces and Nanomaterials VIII, 73960U (20 August 2009); doi: 10.1117/12.825421
Show Author Affiliations
Meng-Yueh Liu, National Taiwan Univ. (Taiwan)
Chih-Hua Chang, National Taiwan Univ. (Taiwan)
Chin-Hsiang Chang, National Taiwan Univ. (Taiwan)
Jing-Shun Huang, National Taiwan Univ. (Taiwan)
Chia-Shin Chao, National Taiwan Univ. (Taiwan)
Yu-Hong Lin, National Taiwan Univ. (Taiwan)
Wen-Han Lin, National Taiwan Univ. (Taiwan)
Ching-Fuh Lin, National Taiwan Univ. (Taiwan)

Published in SPIE Proceedings Vol. 7396:
Physical Chemistry of Interfaces and Nanomaterials VIII
Oliver L. A. Monti; Oleg V. Prezhdo, Editor(s)

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